Stable starting materials of tantalum pentaoxide and titanium dioxide

Shigetaro Ogura; Tomonori Aoki

doi:10.1117/12.141016

4 March 1993 Stable starting materials of tantalum pentaoxide and titanium dioxide

Shigetaro Ogura, Tomonori Aoki

Proceedings Volume 1782, Thin Films for Optical Systems; (1993) https://doi.org/10.1117/12.141016
Event: Optical Systems Design '92, 1992, Berlin, Germany

Abstract

For obtaining thermally resistive and stable high-index materials, Ta₂O₅ films from a noble starting material of Ta₂O₅ + Ta (7 wt% added) have been developed, considering the analogy established in the case of TiO₂ films. The related optical (refractive index and absorption) and stress properties both of Ta₂O₅ and TiO₂ films are reported.

Citation Download Citation

Shigetaro Ogura and Tomonori Aoki "Stable starting materials of tantalum pentaoxide and titanium dioxide", Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); https://doi.org/10.1117/12.141016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available