Paper
2 March 1993 Fiber optic force and displacement sensor based on speckle detection with 0.1-nanonewton and 0.1-angstrom resolution
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Abstract
A new mode of operation for a high-multimode fiber optical sensor based on the detection of modal interference (speckle sensor) is described. The main mechanism in which the sensor is based is coupling between different modes due to curvature induced upon bending of the fiber. In contrast to previous work, the variation of the length of the fiber under such curvatures may be neglected in this work. A sensor of this kind was implemented and showed a resolution of 10-11 m in displacement and 10-10 N in force. The 'spring' constant of the sensor is relatively small (5.6 N/m) compared to similar sensor. A detailed theoretical analysis of the mechanism involved in the transduction process is given. The potential use of this sensor in atomic force microscopy (AFM) is discussed.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Augusto Garcia-Valenzuela and Massood Tabib-Azar "Fiber optic force and displacement sensor based on speckle detection with 0.1-nanonewton and 0.1-angstrom resolution", Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); https://doi.org/10.1117/12.141221
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Cited by 6 scholarly publications.
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KEYWORDS
Sensors

Photodetectors

Atomic force microscopy

Fiber optics sensors

Speckle pattern

Integrated optics

Actuators

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