Analysis of the effects of traversing torch and deposited layer thickness on particle deposition in the modified chemical vapor deposition process

Mansoo Choi; Kyung-Soon Park

doi:10.1117/12.131253

23 October 1992 Analysis of the effects of traversing torch and deposited layer thickness on particle deposition in the modified chemical vapor deposition process

Mansoo Choi, Kyung-Soon Park

Author Affiliations +

Proceedings Volume 1813, Optoelectronic Component Technologies; (1992) https://doi.org/10.1117/12.131253
Event: International Symposium on Optoelectronics in Computers, Communications, and Control, 1992, Hsinchu, Taiwan

Abstract

A study has been carried out for the particle deposition during the Modified Chemical Vapor Deposition (MCVD) process. The analysis includes thermophoretic particle transport in the gas flow inside the tube and heat transfer through the solid layer with considering variable properties for both gas and solid regions. A notable feature of the study is to consider the effects of the periodic heating due to repeatedly traversing of the torch including the effects of the increasing solid layer thickness as the particles deposit. The localized heating of the moving torch is modelled as a gaussian heat flux boundary condition on the tube wall and the surface temperature distribution and the deposition efficiency results in good agreement with the existing experimental data. Of particular interest are the effects of torch speeds and solid layer thicknesses on the efficiency and the rate of deposition of particles, and the tapered length.

Citation Download Citation

Mansoo Choi and Kyung-Soon Park "Analysis of the effects of traversing torch and deposited layer thickness on particle deposition in the modified chemical vapor deposition process", Proc. SPIE 1813, Optoelectronic Component Technologies, (23 October 1992); https://doi.org/10.1117/12.131253

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available