High-performance PtSi Schottky barrier sensor array with imaging capability

Tien-Ming Chuang; Chia Ho; Gi-Ming Shiue; Gwo-Ji Horng; Yu-Wen Chen; Feng-Yuh Juang; Chung-Chi Chang; Ho-Ching Chien; Han-Yu Chang; Chung-Ren Lao; Mon-Shen Chen; Chun-Hui Tsai

doi:10.1117/12.131275

26 October 1992 High-performance PtSi Schottky barrier sensor array with imaging capability

Tien-Ming Chuang, Chia Ho, Gi-Ming Shiue, Gwo-Ji Horng, Yu-Wen Chen, Feng-Yuh Juang, Chung-Chi Chang, Ho-Ching Chien, Han-Yu Chang, Chung-Ren Lao, Mon-Shen Chen, Chun-Hui Tsai

Author Affiliations +

Proceedings Volume 1814, Optical Sensors; (1992) https://doi.org/10.1117/12.131275
Event: International Symposium on Optoelectronics in Computers, Communications, and Control, 1992, Hsinchu, Taiwan

Abstract

A high performance PtSi Schottky barrier sensor array was developed. It was fabricated by using a double-poly double-metal 2.0 micrometers Si-based technology and an ultra-high vacuum E-beam PtSi process. The barrier height of the Schottky barrier IR detector is 0.21 to 0.22 eV with 4nA/cm² dark current density at 77 degree(s)K. Its quantum efficiency is 0.3% at 4 micrometers . The charge handling capacity of the CCD is larger than 2.0E6 electrons/pixel. The charge transfer efficiency of the CCD at 77 degree(s)K is 0.9998 to 0.9999. The imaging capability of this chip to a thermal scene has been demonstrated.

Citation Download Citation

Tien-Ming Chuang, Chia Ho, Gi-Ming Shiue, Gwo-Ji Horng, Yu-Wen Chen, Feng-Yuh Juang, Chung-Chi Chang, Ho-Ching Chien, Han-Yu Chang, Chung-Ren Lao, Mon-Shen Chen, and Chun-Hui Tsai "High-performance PtSi Schottky barrier sensor array with imaging capability", Proc. SPIE 1814, Optical Sensors, (26 October 1992); https://doi.org/10.1117/12.131275

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available