Optical materials for use with excimer lasers

Jan H. C. Sedlacek; Mordechai Rothschild

doi:10.1117/12.143032

19 April 1993 Optical materials for use with excimer lasers

Jan H. C. Sedlacek, Mordechai Rothschild

Proceedings Volume 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design; (1993) https://doi.org/10.1117/12.143032
Event: Applications in Optical Science and Engineering, 1992, Boston, MA, United States

Abstract

Synthetic UV-grade fused silica, crystalline fluorides, and dielectric coatings have been evaluated for transparency and durability at 193 nm. Most bulk materials eventually develop color centers, and fused silica also changes its density and index of refraction. However, the rate at which these changes occur and their magnitude vary strongly with material, grade, and other more subtle details. Careful selection and possibly pretesting are recommended, in order to ensure optimal matching between the intended application and the material properties.

Citation Download Citation

Jan H. C. Sedlacek and Mordechai Rothschild "Optical materials for use with excimer lasers", Proc. SPIE 1835, Excimer Lasers: Applications, Beam Delivery Systems, and Laser Design, (19 April 1993); https://doi.org/10.1117/12.143032

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