Paper
20 October 1993 Monolithic planar Ge:Be arrays
Michael J. Scutero, Erick T. Young, Thomas E. Milner, George H. Rieke, Eugene E. Haller, Jeffrey W. Beeman, Pierino I. Zappella, J. W. Slemmons
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Abstract
As part of a program to extend the wavelength response of infrared array technology beyond the cutoff of extrinsic silicon photoconductivity, we have calculated the optimum parameters for a front-illuminated two dimensional array of Ge:Be detectors. Detector arrays to this prescription have been produced by indium bump bonding onto sapphire fanouts. We report a preliminary performance evaluation of these arrays.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael J. Scutero, Erick T. Young, Thomas E. Milner, George H. Rieke, Eugene E. Haller, Jeffrey W. Beeman, Pierino I. Zappella, and J. W. Slemmons "Monolithic planar Ge:Be arrays", Proc. SPIE 1946, Infrared Detectors and Instrumentation, (20 October 1993); https://doi.org/10.1117/12.158662
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KEYWORDS
Sensors

Semiconducting wafers

Absorption

Indium

Infrared detectors

Infrared sensors

Germanium

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