Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films

E. I. Krupitsky; S. V. Morosov; Tatyana N. Sergeenko

doi:10.1117/12.155040

3 September 1993 Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films

E. I. Krupitsky, S. V. Morosov, Tatyana N. Sergeenko

Author Affiliations +

Proceedings Volume 1978, Coherent Measuring and Data Processing Methods and Devices; (1993) https://doi.org/10.1117/12.155040
Event: Coherent Measuring and Data Processing Methods and Devices: Selected Papers, 1993, Bellingham, WA, United States

Abstract

The holographic method to control transparent plate and film thickness variations by heterodyne measurement of the phase of transversed coherent light is theoretically and experimentally analyzed. It provides very high accuracy (about 1 nm) of the thickness variations measurements in visible range.

Citation Download Citation

E. I. Krupitsky, S. V. Morosov, and Tatyana N. Sergeenko "Heterodyne holographic method of data acquisition on thickness variation of transparent plates and films", Proc. SPIE 1978, Coherent Measuring and Data Processing Methods and Devices, (3 September 1993); https://doi.org/10.1117/12.155040

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available