New method of improving the sensitivity of real-time measuring of the surface roughness of workpieces

Yawei Wang; Ying-Dong Liu

doi:10.1117/12.163639

25 November 1993 New method of improving the sensitivity of real-time measuring of the surface roughness of workpieces

Yawei Wang, Ying-Dong Liu

Proceedings Volume 2000, Current Developments in Optical Design and Optical Engineering III; (1993) https://doi.org/10.1117/12.163639
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

Based on the principle that after illuminating the rough surface the two coherent plane waves can be coherent and this coherence has something to do with the surface roughness a split system with an adjustable incident angle is proposed in this paper -- it consists of a moving reflector and a double Dove prism which can divide one beam of the plane wave into two coherent plane waves. Through an interferometer the scattered coherent optical field is produced and a correlation speckle pattern which can be received by CCD is produced. The visibility of the pattern together with the other collected signals such as incident angle and so on are put into a computer. After data processing, the result value of the roughness is exported directly by the computer. The experimental results show that because of the adjustable incident angles this new method can improve the measuring sensitivity greatly on the condition that it does not influence the measuring extent and meanwhile, because of the introduction of the CCD and the computer, it can obviously strength the real-time and aging of measuring.

Citation Download Citation

Yawei Wang and Ying-Dong Liu "New method of improving the sensitivity of real-time measuring of the surface roughness of workpieces", Proc. SPIE 2000, Current Developments in Optical Design and Optical Engineering III, (25 November 1993); https://doi.org/10.1117/12.163639

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KEYWORDS

Surface roughness

Charge-coupled devices

Prisms

Beam splitters

Visibility

Data processing

Interferometers

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