Microtopographic inspection of surfaces: a comparison between moire, contrived lighting, and discreet triangulation methods

Manuel Filipe M. Costa; Jose B. Almeida

doi:10.1117/12.165479

10 December 1993 Microtopographic inspection of surfaces: a comparison between moire, contrived lighting, and discreet triangulation methods

Manuel Filipe M. Costa, Jose B. Almeida

Author Affiliations +

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165479
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

In this communication the issue of the micro-inspection of the relief structure of surfaces in the industrial world is discussed. Microtopographic inspection of surfaces, especially rough ones, by non-contact optical means is gaining more and more interest. New approaches to well-established methods like triangulation, both area and discreet, are being tried to meet the new requirements. We present a comparative study of three triangulation based dimensional inspection methods: moire that combines interferometry and triangulation, contrived lightning, and discreet active triangulation that in recent years regained interest by its versatility. New approaches are presented with emphasis to a new active, discreet, triangulation based system recently developed.

Citation Download Citation

Manuel Filipe M. Costa and Jose B. Almeida "Microtopographic inspection of surfaces: a comparison between moire, contrived lighting, and discreet triangulation methods", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165479

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