Performance characteristics of integrated low-energy broad ion beam extraction optics

D. Korzec; H.-M. Keller; J. Engemann

doi:10.1117/12.155692

3 September 1993 Performance characteristics of integrated low-energy broad ion beam extraction optics

D. Korzec, H.-M. Keller, J. Engemann

Proceedings Volume 2014, Charged-Particle Optics; (1993) https://doi.org/10.1117/12.155692
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

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D. Korzec, H.-M. Keller, and J. Engemann "Performance characteristics of integrated low-energy broad ion beam extraction optics", Proc. SPIE 2014, Charged-Particle Optics, (3 September 1993); https://doi.org/10.1117/12.155692

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