Paper
21 January 1994 ZnO-patterned-film piezoelectric transducers for shear acoustic waves
Vyacheslav G. Nefedov, Oleg G. Gabaraev
Author Affiliations +
Proceedings Volume 2051, International Conference on Optical Information Processing; (1994) https://doi.org/10.1117/12.165969
Event: Optical Information Processing: International Conference, 1993, St. Petersburg, Russian Federation
Abstract
In current publications, there is no information about the development and use of film piezoelectric transducers for shear waves, though they can be useful (e.g., for manufacturing a gigaHertz band acousto-optic modulator with anisotropic diffraction in LiNbO3. The absence of results in this area is connected with the fact that it is very difficult to deposit the required film because the pattern axis must be oriented in two directions.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vyacheslav G. Nefedov and Oleg G. Gabaraev "ZnO-patterned-film piezoelectric transducers for shear acoustic waves", Proc. SPIE 2051, International Conference on Optical Information Processing, (21 January 1994); https://doi.org/10.1117/12.165969
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KEYWORDS
Zinc oxide

Transducers

Acoustics

Sputter deposition

Manufacturing

Optical signal processing

Crystals

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