CD results for 6 inch 250 mil PBS photoblanks for a 0.50 micron generation photomask process

Chris K. Keith

doi:10.1117/12.167250

15 February 1994 CD results for 6 inch 250 mil PBS photoblanks for a 0.50 micron generation photomask process

Chris K. Keith

Proceedings Volume 2087, 13th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.167250
Event: 13th Annual BACUS Symposium on Photomask Technology and Management, 1993, Santa Clara, CA, United States

Abstract

This paper discusses work done at Intel to meet CD specifications for a 0.50 micron generation photomask process using 6' 250 mil photoblanks coated with PBS resist. Initial CD uniformity results indicated that the develop tool was the main source of non-uniformity. To reduce the contribution of the develop tool, two strategies were pursued simultaneously to ensure that the within-plate linewidth uniformity (3 sigma) of the etched CD's would be 50 nm. The first strategy was to improve the capability of the current developer and to determine if any write parameters could be modified to allow for more process latitude. The second strategy was to evaluate new developers and identify a possible replacement. Both of these strategies will be presented with accompanying results for CD uniformity of the developed and etched CD structures.

Citation Download Citation

Chris K. Keith "CD results for 6 inch 250 mil PBS photoblanks for a 0.50 micron generation photomask process", Proc. SPIE 2087, 13th Annual BACUS Symposium on Photomask Technology and Management, (15 February 1994); https://doi.org/10.1117/12.167250

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available