Grating interference technology and its application

Tie-Bang Xie; Bin Liu Zhao; Dong-Lian Zheng

doi:10.1117/12.156500

22 September 1993 Grating interference technology and its application

Tie-Bang Xie, Bin Liu Zhao, Dong-Lian Zheng

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156500
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

Grating interference technology because of its many advantages has been developed greatly in the field of fine metrology. The principle and characteristics of grating interference are analyzed and examples of its successful application are given.

Citation Download Citation

Tie-Bang Xie, Bin Liu Zhao, and Dong-Lian Zheng "Grating interference technology and its application", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156500

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