Grating quadrature fringe subdivision with submicron accuracy and its application in CMM

Rensheng Che; Li-Yan Chen; Cheng-Jun Chen; Qingcheng Huang

doi:10.1117/12.156503

22 September 1993 Grating quadrature fringe subdivision with submicron accuracy and its application in CMM

Rensheng Che, Li-Yan Chen, Cheng-Jun Chen, Qingcheng Huang

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156503
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The significant resolution and accuracy of CMM ( Coordinat Measuring Machine ) using grating quadrature fringe detection are often limited not only by the CMM itself but also by the grating displasment measuring system. There are four errors: amplitude waver unequal amplitude in the two channels quadrature phase shift error and zero offsets. This paper describes a new method for picking up correcting the quadrature errors and subdividing -- method of composite compensating subdivision using microcomputer. An example demonstrated the significant improving of the precision of CMM and the reducing the needs of fix and adjustment of grading pair is given.

Citation Download Citation

Rensheng Che, Li-Yan Chen, Cheng-Jun Chen, and Qingcheng Huang "Grating quadrature fringe subdivision with submicron accuracy and its application in CMM", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156503

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