Microdisplacement measurement in high-accuracy moving stage by strain gauges

Pengsheng Li; Hainan Cai

doi:10.1117/12.156308

22 September 1993 Microdisplacement measurement in high-accuracy moving stage by strain gauges

Pengsheng Li, Hainan Cai

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156308
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A noncontact displacement measuring apparatus similar in mechanism and electronics to the parallel bending beam weight scale has been made experimentally. The apparatus has four parallel bending beams as elastic elements that are also parts of the moving stage. When the moving stage is pushed up by a piezoelectric actuator there exists strain and deflection in the bending beams. Eight strain gages that are employed in a bridge configuration are placed on the regions of compression and tension of the beams. Thus the micro-displacement of the moving stage that is proportional to the output of the bridge can be measured.

Citation Download Citation

Pengsheng Li and Hainan Cai "Microdisplacement measurement in high-accuracy moving stage by strain gauges", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156308

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