Non-contact surface roughness measurement

Hong Gao; Shifu Xue; Qingxiang Li; Puchiang Yan

doi:10.1117/12.156333

22 September 1993 Non-contact surface roughness measurement

Hong Gao, Shifu Xue, Qingxiang Li, Puchiang Yan

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156333
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

A noncontact optical profiler for measuring surface roughness is described. The system consists of a differential interference microscope with a polarization phase shifter CCD detector array video frame grabber and computer. Interferometric phaseshifting techniques are used to obtain surface slope information. The slope data is then integrated to yield a surface profile. Vibration insensitivity has been achieved by adopting a differential interferometric scheme. The profiler has measured surface features with a vertical resolution of 1 nm and a lateral resolution of less than 0. 5 m in an ordinary laboratory environment without vibration isolation.

Citation Download Citation

Hong Gao, Shifu Xue, Qingxiang Li, and Puchiang Yan "Non-contact surface roughness measurement", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156333

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