Study and design of microfocusing mechanism for an acoustic microscope

Feng Zhu; Hong-Hai Zhang; Ri-Yao Chen; Qi-Kui Huang

doi:10.1117/12.156393

22 September 1993 Study and design of micro-focusing mechanism for an acoustic microscope

Feng Zhu, Hong-Hai Zhang, Ri-Yao Chen, Qi-Kui Huang

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156393
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

This paper deals with the design of a micro- focussing mechanism for the acoustic microscope through the theory of flexure hinge. The paper gives the calculating way and formulas for design of flexure hinge. The flexure hinge mechanism amplified by two step levers and corresponding controller is implemented. It is shown by experi-mental results that the resolution of the micro- focussing system is higher than 0.001mm and an adjusting range of 16Oim is achieved. In addition, the paper also discusses the driving property of a piezoelectric actuator used in flexure hinge mechanism.

Citation Download Citation

Feng Zhu, Hong-Hai Zhang, Ri-Yao Chen, and Qi-Kui Huang "Study and design of micro-focusing mechanism for an acoustic microscope", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156393

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available