Theoretical analysis and testing research of vibration isolation system for the scanning tunneling microscope

Hong-Hai Zhang; Shang-Ping Li; Gui-Jing Sun; Hanming Shi; Ri-Yao Chen

doi:10.1117/12.156415

22 September 1993 Theoretical analysis and testing research of vibration isolation system for the scanning tunneling microscope

Hong-Hai Zhang, Shang-Ping Li, Gui-Jing Sun, Hanming Shi, Ri-Yao Chen

Author Affiliations +

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156415
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

The main problem encountered in the design of a scanning tunneling microscope is to maintain a precise tipsample position , which is affected mainly by vibration. This paper describes the design for a vibration isolation system consisting of spring suspension and a stack of several metallic plates ,separated by rubber elements respectively. The theoretical analysis and testing research of that is included. In our instruments ,the effect on the vibration isolation of different values of parameters such as the number of stacks (N) and the mass(M)is analysed, the good results of antivibration are obtained.

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Hong-Hai Zhang, Shang-Ping Li, Gui-Jing Sun, Hanming Shi, and Ri-Yao Chen "Theoretical analysis and testing research of vibration isolation system for the scanning tunneling microscope", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156415

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