Photodefinable benzocyclobutene as an optical waveguide material

Casey F. Kane; Robert R. Krchnavek

doi:10.1117/12.174508

2 May 1994 Photodefinable benzocyclobutene as an optical waveguide material

Casey F. Kane, Robert R. Krchnavek

Proceedings Volume 2153, Optoelectronic Interconnects II; (1994) https://doi.org/10.1117/12.174508
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Optical channel waveguides with single-mode dimensions have been fabricated using a photodefinable polymer system based on the benzocyclobutene resin and a bisarylazide photo- crosslinking agent. This photo-polymer offers a simple technique for fabricating optical interconnects in multi-chip modules. The processing conditions and developer selection required for the fabrication of benzocyclobutene optical waveguides is presented. With the losses in the waveguide typically less than 1 dB/cm, this material system is suitable for use in a variety of optical interconnect problems.

Citation Download Citation

Casey F. Kane and Robert R. Krchnavek "Photodefinable benzocyclobutene as an optical waveguide material", Proc. SPIE 2153, Optoelectronic Interconnects II, (2 May 1994); https://doi.org/10.1117/12.174508

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