Identification of diazonaphthoquinone esters of polyhydroxybenzophenone compounds

John DiCarlo; O. B. Evans; J. Fedyk; Stanley A. Ficner; Mohammad A. Khadim; Ralph R. Dammel

doi:10.1117/12.175383

16 May 1994 Identification of diazonaphthoquinone esters of polyhydroxybenzophenone compounds

John DiCarlo, O. B. Evans, J. Fedyk, Stanley A. Ficner, Mohammad A. Khadim, Ralph R. Dammel

Proceedings Volume 2195, Advances in Resist Technology and Processing XI; (1994) https://doi.org/10.1117/12.175383
Event: SPIE's 1994 Symposium on Microlithography, 1994, San Jose, CA, United States

Abstract

The seven possible 2,1-diazonaphthoquinone-5-sulfonates of 2,3,4- trihydroxybenzophenone have been isolated and characterized by IR, chromatographic and advanced NMR techniques. HPLC procedures for their analysis are given which show counterintuitive effects in the HPLC elution sequence due to the effect of intramolecular H-bonding on the polarity of some esters. A reaction scheme is proposed which qualitatively identifies preferred pathways to the trisester.

Citation Download Citation

John DiCarlo, O. B. Evans, J. Fedyk, Stanley A. Ficner, Mohammad A. Khadim, and Ralph R. Dammel "Identification of diazonaphthoquinone esters of polyhydroxybenzophenone compounds", Proc. SPIE 2195, Advances in Resist Technology and Processing XI, (16 May 1994); https://doi.org/10.1117/12.175383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available