High-precision optical measurement methods

Hans J. Tiziani

doi:10.1117/12.194305

15 November 1994 High-precision optical measurement methods

Hans J. Tiziani

Proceedings Volume 2248, Optical Measurements and Sensors for the Process Industries; (1994) https://doi.org/10.1117/12.194305
Event: Optics for Productivity in Manufacturing, 1994, Frankfurt, Germany

Abstract

A variety of high precision optical measurement methods are presented and discussed. Noncontact optical methods are appropriate for micro- and macrostructure measurements. Time of flight and phase measuring techniques with a resolution in the order of a few mm to one mm respectively are covered. Furthermore active and passive triangulation techniques are very robust and appropriate for different applications in precision measurements. Moire techniques or projected fringe techniques are useful tools for topography measurements. Furthermore image plane locating systems can be applied to analyze the surface topometry. Recently confocal principles were studied to be applied for the measurement of the surface geometry and microstructure. Today, laser interferometry is probably one of the most commonly used techniques for very high resolution measurements in metrology. Interferometry and Moire techniques as well as image plane locating systems will be applied more frequently, when used with image processing. They are becoming useful tools for precision measurements in research and for industrial applications. Computer analysis is increasingly important for fringe analysis. The use of solid-state detector arrays, image memory boards together with microprocessors and computers for the extraction of the information from the interferograms and high-resolution graphic boards find important application in optical metrology.

Citation Download Citation

Hans J. Tiziani "High-precision optical measurement methods", Proc. SPIE 2248, Optical Measurements and Sensors for the Process Industries, (15 November 1994); https://doi.org/10.1117/12.194305

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