Paper
30 November 2017 GaInAs/InP composite channel HEMTs for millimeter wave power applications
Mehran Matloubian
Author Affiliations +
Proceedings Volume 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994; 22508G (2017) https://doi.org/10.1117/12.2303321
Event: Millimeter and Submillimeter Waves and Applications: International Conference, 1994, San Diego, CA, United States
Abstract
InP-based HEMTs with GaInAs channels have demonstrated great potential for millimeter wave power applications [1]. One of the major draw-back of InP-based HEMTs has been the low value of the drain-to-source breakdown voltage due to the low bandgap of the Ga0.471n0.53As channel. By using InP as the channel material it is possible to increase the bandgap of the channel and effectively the channel breakdown [2]. But due to the low mobility of InP and high sheet resistivity it is difficult to make an ohmic contact directly to the channel and the device can have a high access resistance and a high knee voltage in their I-V characteristics. By using a combination of a thin layer of GaInAs and InP as the channel material it is possible to use the advantages of both materials (high mobility of GaInAs at low fields, and high breakdown and saturation velocity of InP at high fields) [3,4]. Such a composite channel allows direct ohmic contact formation to the channel with a higher channel breakdown than an GaInAs channel but lower than an InP channel.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mehran Matloubian "GaInAs/InP composite channel HEMTs for millimeter wave power applications", Proc. SPIE 2250, International Conference on Millimeter and Submillimeter Waves and Applications 1994, 22508G (30 November 2017); https://doi.org/10.1117/12.2303321
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KEYWORDS
Field effect transistors

Composites

Extremely high frequency

Semiconducting wafers

Waveguides

Boron

Doping

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