Novel Si-substrate-mode-based wafer scale optical clock distribution architecture

Luke A. Graham; Oleg A. Ershov; Suning Tang; Ray T. Chen

doi:10.1117/12.206303

5 April 1995 Novel Si substrate mode based wafer scale optical clock distribution architecture

Luke A. Graham, Oleg A. Ershov, Suning Tang, Ray T. Chen

Proceedings Volume 2400, Optoelectronic Interconnects III; (1995) https://doi.org/10.1117/12.206303
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

In this paper we demonstrate a novel Si wafer based optical clock distribution technique operating 1.3 micrometers and based on a central polygonal input coupling grating structure and surrounding rings of linear output coupling gratings. In this arrangement, both the central polygonal and linear output gratings have a period of 1 micrometers , allowing light to be efficiently coupled into and out of the Si wafer substrate mode in the surface normal direction. A double side polished Si wafer is used to limit the surface scattering losses as the signal travels through the bulk of the Si wafer. One of the major advantages of this technique is that, since the gratings can be written onto the Si surface using optical contact lithography and reactive ion etching, an array of grating shapes and depths can be selected to optimize the diffraction efficiency and focus the output beams onto the associated multi-chip module (MCM). This helps to reduce the optical power requirements that a future system would have and also allows for greater flexibility in system packaging design.

Citation Download Citation

Luke A. Graham, Oleg A. Ershov, Suning Tang, and Ray T. Chen "Novel Si substrate mode based wafer scale optical clock distribution architecture", Proc. SPIE 2400, Optoelectronic Interconnects III, (5 April 1995); https://doi.org/10.1117/12.206303

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available