Paper
26 May 1995 Integrated force arrays: scaling methods for extended range and force
Stephen M. Bobbio, Scott H. Goodwin-Johansson, Thomas D. DuBois, Farid M. Tranjan, James Jacobson, Charles Bartlett, Nadeem Eleyan
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Abstract
Integrated Force Arrays (IFAs) are thin, flexible, metallized membranes which may be configured as actuators or sensors. The current prototype structures are approximately 1 cm long by 1 mm wide and designed for deformations of 2 mm. In this paper we will discuss how the devices may be scaled-up for extended range and force.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stephen M. Bobbio, Scott H. Goodwin-Johansson, Thomas D. DuBois, Farid M. Tranjan, James Jacobson, Charles Bartlett, and Nadeem Eleyan "Integrated force arrays: scaling methods for extended range and force", Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); https://doi.org/10.1117/12.210459
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Cited by 1 scholarly publication.
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KEYWORDS
Metals

Capacitors

Dielectrics

Reactive ion etching

Oxides

Semiconducting wafers

Etching

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