MEMS for smart structures

Mehran Mehregany; Christopher A. Bang

doi:10.1117/12.210453

26 May 1995 MEMS for smart structures

Mehran Mehregany, Christopher A. Bang

Proceedings Volume 2448, Smart Structures and Materials 1995: Smart Electronics; (1995) https://doi.org/10.1117/12.210453
Event: Smart Structures and Materials '95, 1995, San Diego, CA, United States

Abstract

This paper describes the use of MEMS in smart structures. A smart skin concept is described in which an array of sensors and actuators may be incorporated onto the surface of a structure. A hear flux sensor array concept is described, and shear stress sensors are presented as examples of MEMS devices for structure surfaces. MEMS devices may also be embedded into a structure. For example, pressure and temperature memory sensors are presented for a smart-tire application, in which the MEMS device may be embedded into the tire to provide tire-monitoring capabilities.

Citation Download Citation

Mehran Mehregany and Christopher A. Bang "MEMS for smart structures", Proc. SPIE 2448, Smart Structures and Materials 1995: Smart Electronics, (26 May 1995); https://doi.org/10.1117/12.210453

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