Ultrahigh-resolution soft x-ray tomography

Waleed S. Haddad; James E. Trebes; Dennis M. Goodman; Heung-Rae Lee; Ian McNulty; Erik H. Anderson; Andrei O. Zalensky

doi:10.1117/12.221664

25 September 1995 Ultrahigh-resolution soft x-ray tomography

Waleed S. Haddad, James E. Trebes, Dennis M. Goodman, Heung-Rae Lee, Ian McNulty, Erik H. Anderson, Andrei O. Zalensky

Proceedings Volume 2516, X-Ray Microbeam Technology and Applications; (1995) https://doi.org/10.1117/12.221664
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Ultra high resolution three-dimensional images of a microscopic test object were made with soft x rays using a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by approximately 5 micrometer. A series of nine 2-D images of the object were recorded at angles between -5 to +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a 3-D image by means of an algebraic reconstruction technique (ART) algorithm. A transverse resolution of approximately 1000 angstrom was observed. Artifacts in the reconstruction limited the overall depth resolution to approximately 6000 angstrom, however some features were clearly reconstructed with a depth resolution of approximately 1000 angstrom. A specially modified ART algorithm and a constrained conjugate gradient (CCG) code were also developed as improvements over the standard ART algorithm. Both of these methods made significant improvements in the overall depth resolution, bringing it down to approximately 1200 angstrom overall. Preliminary projection data sets were also recorded with both dry and re-hydrated human sperm cells over a similar angular range.

Citation Download Citation

Waleed S. Haddad, James E. Trebes, Dennis M. Goodman, Heung-Rae Lee, Ian McNulty, Erik H. Anderson, and Andrei O. Zalensky "Ultrahigh-resolution soft x-ray tomography", Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); https://doi.org/10.1117/12.221664

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