Laser beam divergence meter

A. L. Etsina; Lev N. Butenko; Ilya Sh. Etsin

doi:10.1117/12.216915

23 August 1995 Laser beam divergence meter

A. L. Etsina, Lev N. Butenko, Ilya Sh. Etsin

Proceedings Volume 2619, International Conference on Atomic and Molecular Pulsed Laser; (1995) https://doi.org/10.1117/12.216915
Event: Second Conference on Pulsed Lasers: Pulsed Atomic and Molecular Transitions, 1995, Tomsk, Russian Federation

Abstract

The beam angular divergence meter with CCD camera intended for beam quality test of the excimer laser has been developed. Maximum diameter of laser beam under test is 110 mm. The resolution of the instrument corresponds to diffraction limits. Wavelength region is within the limits 200-1100 nm. Preliminary meter testing has been carried out using the commercial ILGI-503 repetitively pulsed nitrogen laser and the LGN-105 CW He-Ne laser. Performance of the instrument has been demonstrated to be satisfactory both for CW operation mode and pulse operation mode.

Citation Download Citation

A. L. Etsina, Lev N. Butenko, and Ilya Sh. Etsin "Laser beam divergence meter", Proc. SPIE 2619, International Conference on Atomic and Molecular Pulsed Laser, (23 August 1995); https://doi.org/10.1117/12.216915

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