ARROW-based integrated optical pressure sensors

Kamel Benaissa; Arokia Nathan

doi:10.1117/12.221175

15 September 1995 ARROW-based integrated optical pressure sensors

Kamel Benaissa, Arokia Nathan

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221175
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

In this paper, we present a review of micromechanical Mach-Zehnder interferometer pressure sensors based on silicon integrated optics. The sensors are based on the ARROW waveguide structure and fabricated using IC compatible dielectrics.

Citation Download Citation

Kamel Benaissa and Arokia Nathan "ARROW-based integrated optical pressure sensors", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221175

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