Three-dimensional structures for micro-optical mechanical systems in standard CMOS

Ezekiel J. Kruglick; Shirish Damle; Kristofer S. J. Pister

doi:10.1117/12.221176

15 September 1995 Three-dimensional structures for micro-optical mechanical systems in standard CMOS

Ezekiel J. Kruglick, Shirish Damle, Kristofer S. J. Pister

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221176
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

A design is presented and tested to build and actuate reflection based 3D micro-opto- mechancial systems in standard CMOS using only a single maskless post-processing step. We have built two generations of structures and actuated them at various frequencies. The initial design uses the various components of CMOS to make a rigid box being pulled against the substrate. Results and photos are presented to show the actuation. Possible developments which take advantage of the CMOS underlying the structure are discussed.

Citation Download Citation

Ezekiel J. Kruglick, Shirish Damle, and Kristofer S. J. Pister "Three-dimensional structures for micro-optical mechanical systems in standard CMOS", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221176

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