Laser microscopy of electronic devices

Colin J. R. Sheppard

doi:10.1117/12.226223

3 November 1995 Laser microscopy of electronic devices

Colin J. R. Sheppard

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226223
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

Laser microscopy offers numerous possibilities for measurement of topographical, electronic, and material properties of microelectronic and optoelectronic devices.

Citation Download Citation

Colin J. R. Sheppard "Laser microscopy of electronic devices", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226223

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