Er3+ phosphate glass optical waveguide amplifiers at 1.5 um on silicon

Yingchao Yan; Anne Jans Faber; Henk de Waal

doi:10.1117/12.229939

10 January 1996 Er³⁺ phosphate glass optical waveguide amplifiers at 1.5 μm on silicon

Yingchao Yan, Anne Jans Faber, Henk de Waal

Proceedings Volume 2695, Functional Photonic and Fiber Devices; (1996) https://doi.org/10.1117/12.229939
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

RF-sputtering techniques were employed to produce Er-doped phosphate glass films on thermally oxidized silicon wafers. Film compositions were characterized by X-ray photoelectron spectroscopy. As-deposited films showed very low Er luminescence lifetimes. By postannealing of deposited films in pure oxygen, Er photoluminescence emission lifetime of the ⁴I_13/2 - ⁴I_15/2 transition could be increased from 1 - 2 ms to 8 - 9 ms. The long Er lifetime of the deposited films is very promising for achieving an optical gain. A dependence of measured lifetimes on pump power was observed which are related to a up-conversion quenching process. After postannealing, the sputtered waveguides showed relatively low attenuation loss at the potential pumping and signaling wavelengths. The loss spectrum from 700 nm to 1600 nm was measured by two-prism coupling. The films were easy to be patterned by lithography and ridge channel waveguides were developed by argon plasma etching.

Citation Download Citation

Yingchao Yan, Anne Jans Faber, and Henk de Waal "Er³⁺ phosphate glass optical waveguide amplifiers at 1.5 μm on silicon", Proc. SPIE 2695, Functional Photonic and Fiber Devices, (10 January 1996); https://doi.org/10.1117/12.229939

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