Novel heterodyne interferometer for measuring displacement

Yong-jun Wu

doi:10.1117/12.2316230

1 September 1996 Novel heterodyne interferometer for measuring displacement

Yong-jun Wu

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778F1 (1996) https://doi.org/10.1117/12.2316230
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A novel heterodyne interferometer with a laser diode for measuring displacement is proposed. The heterodyne carrier signal is created by using an acousto-optic modulator. The back surface of a λ/4 plate serves as the reference mirror. These make the interferometer have very simple construction. The displacement is obtained by measuring the phase difference between the measurement signal and reference signal.

Citation Download Citation

Yong-jun Wu "Novel heterodyne interferometer for measuring displacement", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778F1 (1 September 1996); https://doi.org/10.1117/12.2316230

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