In-process measurement of concave mirror by fiber grating line-Hartmann test

Tsuguo Kohno

doi:10.1117/12.2316255

1 September 1996 In-process measurement of concave mirror by fiber grating line-Hartmann test

Tsuguo Kohno

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778FQ (1996) https://doi.org/10.1117/12.2316255
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A new Hartmann test method is developed using a single optical fiber grating and a rotating spindle instead of using clossed fiber grating sheets. Being illuminated with laser light, the fiber grating generates one-plane fan-like diverging multiple rays of almost same intensities. Reflected rays from the mirror surface under test are converging to make straight multi-spot pattern. A CCD camera detects the pattern and a personal computer analyzes it into sectional figure error. For the workpiece on a rotating spindle, several measurements are carried out synchronously to the deferent turning angles, and these sectional figures are synthesized into a three dimensional figure error map. Experiments of on-machine measurement showed it as a stable measurement method of about 1/10λ accuracy and confirmed to be applicable to in-process measurement for machining control.

Citation Download Citation

Tsuguo Kohno "In-process measurement of concave mirror by fiber grating line-Hartmann test", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FQ (1 September 1996); https://doi.org/10.1117/12.2316255

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