Micromachining with copper vapor lasers

Hans Wilhelm Bergmann; Norbert Bartl; Roland Mayerhofer

doi:10.1117/12.251194

23 September 1996 Micromachining with copper vapor lasers

Hans Wilhelm Bergmann, Norbert Bartl, Roland Mayerhofer

Proceedings Volume 2789, High-Power Lasers: Applications and Emerging Applications; (1996) https://doi.org/10.1117/12.251194
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

When high quality laser beam are combined with suitable imaging optics and manipulation systems, laser micro machining offers excellent solutions to industrial needs. In this context the presented work was performed to demonstrate the potential of the copper vapor laser for upcoming applications. Therefore, a systematic series of laser beam cutting, drilling and milling experiments were carried out using copper sheets of thickness between 0.01 mm and 0.250 mm. In a first step zero-dimensional, 1D and 2D structures were generated with depth/width ratios varying from 1:100 to 10:1 using different processing strategies. The results have been characterized in terms of the minimal geometrical deviations and processing speeds achievable.

Citation Download Citation

Hans Wilhelm Bergmann, Norbert Bartl, and Roland Mayerhofer "Micromachining with copper vapor lasers", Proc. SPIE 2789, High-Power Lasers: Applications and Emerging Applications, (23 September 1996); https://doi.org/10.1117/12.251194

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