Miniaturized electrically steerable mirror holder fabricated with an integral cutting conception

Thomas C. Sidler; Eric Leiglon; Manuel Bouvier

doi:10.1117/12.251178

23 September 1996 Miniaturized electrically steerable mirror holder fabricated with an integral cutting conception

Thomas C. Sidler, Eric Leiglon, Manuel Bouvier

Proceedings Volume 2789, High-Power Lasers: Applications and Emerging Applications; (1996) https://doi.org/10.1117/12.251178
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

High precision laser cutting permits a new approach for the conception and realization of complex miniaturized components and systems necessitating very high absolute dimensional and assembling precision. The laser cutting with a pulsed TEM00 Nd:YAG-slab laser results in mechanical tolerances and a reproducibility better than 3 micrometers over working areas of up to 30 X 30 mm². This permits not only to realize mechanical 2D-parts with very high dimensional precision but also the introduction of features for precise assembling of complex structures with very close tolerances without the need of delicate assembling procedures and machines. We present, as an example, an electrically steerable miniature mirror mount. In a volume of 10 by 10 by 4 mm³, a mirror with a clear aperture of 4 mm, an angular excursion of +/- 2 mrad and an axial excursion of 15 micrometers can be realized. The mechanical resonance lies between 200 and 600 Hz, depending essentially on the mirror mass and the stiffness of the flexure elements. Such a device can be used e.g. in laser resonators as passive or actively controlled mirror, in resonant cavities for SHG and THG or as a small Fabry-Perot spectrum analyzer.

Citation Download Citation

Thomas C. Sidler, Eric Leiglon, and Manuel Bouvier "Miniaturized electrically steerable mirror holder fabricated with an integral cutting conception", Proc. SPIE 2789, High-Power Lasers: Applications and Emerging Applications, (23 September 1996); https://doi.org/10.1117/12.251178

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