Development of deep-UV and excimer pellicle (membrane longevity)

Motofuni Kashiwagi; Hitomi Matsuzaki; Norio Nakayama

doi:10.1117/12.245231

24 July 1996 Development of deep-UV and excimer pellicle (membrane longevity)

Motofuni Kashiwagi, Hitomi Matsuzaki, Norio Nakayama

Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245231
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan

Abstract

At the BACUS Symposium held in Santa Clara in 1993, we made a presentation on pellicles for KrF Excimer (including UV-II) stepper based on our development activities. In this presentation, among other issues, we pointed out that compound vapors in the clean room environment influence longevity of the membrane made of fluoropolymer. However, a series of tests, which the presentation was based upon, were carried out by using approximately 2,000 times stronger beam intensity than the actual stepper beam intensity. Ideally, the tests should have completed by applying actual stepper beam intensity ; however, it would take at least 6 months to one year to complete one test, and therefore, this method is not practical. This time, we have applied Kinetic theory analysis to light resistance of KrF Excimer pellicle under stepper's laser exposure conditions.

Citation Download Citation

Motofuni Kashiwagi, Hitomi Matsuzaki, and Norio Nakayama "Development of deep-UV and excimer pellicle (membrane longevity)", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); https://doi.org/10.1117/12.245231

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available