Generalized algorithm for phase shifting interferometry

Shouhong Tang

doi:10.1117/12.276324

17 July 1996 Generalized algorithm for phase shifting interferometry

Shouhong Tang

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276324
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A new generalized algorithm for phase extraction from interferograms recorded sequentially at different phase shifts is proposed. It is developed from the principle of least-square fining with a weight function. This algorithm removes many of the restrictions imposed by conventional phase-measuring algorithms, such as requiring a constant phase shift between consecutive interferograms. This algorithm can estimate phase from a series of sample interferograms with arbitrary phase shift, as long as the phase shifts between these interferograms are known. By introducing the proper weight function, the proposed algorithm is able to estimate the phase with a high degree of tolerance to common error sources including phase-shift mis-estimation and detector nonlinearity. Consequently, this technique may offer improved phase estimation relative to unweighted generalized algorithms using the same number of intensity frames. Theoretical analysis and results supported by numerical simulation and experiments are presented. Keywords: phase shifting interferometry, optical metrology, phase-measuring algorithms.

Citation Download Citation

Shouhong Tang "Generalized algorithm for phase shifting interferometry", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276324

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