Paper
16 August 1996 Fast ellipsometry and Mueller matrix ellipsometry using the division-of-amplitude photopolarimeter
Shankar Krishnan, Paul C. Nordine
Author Affiliations +
Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246205
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan
Abstract
This paper describes the division-of-amplitude photopolarimeter, DOAP, which measures the complete polarization state of light at rates up to 2 KHz and is being developed for measurement rates up to 2 MHz. Application of the DOAP for fast ellipsometry and for Mueller-matrix ellipsometry is also described. Example results from fast ellipsometry during pulse heating experiments are given. Mueller-matrix ellipsometry using rotating quarter wave retarders and liquid crystal phase retarders is presented along with recent results.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shankar Krishnan and Paul C. Nordine "Fast ellipsometry and Mueller matrix ellipsometry using the division-of-amplitude photopolarimeter", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246205
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Cited by 8 scholarly publications and 2 patents.
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