Thickness and index measurements of 8-um liquid crystal gap between plates by spectroscopic ellipsometry

Christophe Defranoux; Jean-Louis P. Stehle

doi:10.1117/12.246257

16 August 1996 Thickness and index measurements of 8-um liquid crystal gap between plates by spectroscopic ellipsometry

Christophe Defranoux, Jean-Louis P. Stehle

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246257
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

The final structure of the LCD devices can be extremely complex in terms of layer structure and material combination. Prior to the characterization of the entire depth of the complete screen, a precise analysis of the different layers involved in the structure is necessary. In this procedure the optical indices and thicknesses of the dielectric, ITO and complementary layers are successively determined. Final characterization of the complete device is then made possible and large gap with or without liquid crystals can be determined by the same technique. Due to the total thickness, a high spectral resolution is needed, and a spatial resolution for the measurement spot is also required to avoid lateral inhomogeneities. The index of the liquid crystal layer can finally be deduced with reasonable accuracy.

Citation Download Citation

Christophe Defranoux and Jean-Louis P. Stehle "Thickness and index measurements of 8-um liquid crystal gap between plates by spectroscopic ellipsometry", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246257

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