Gate oxide field design in the sub-10-nm region

Katsuhiko Kubota; C. Suzuki; Kosuke Okuyama; N. Suzuki

doi:10.1117/12.250869

13 September 1996 Gate oxide field design in the sub-10-nm region

Katsuhiko Kubota, C. Suzuki, Kosuke Okuyama, N. Suzuki

Proceedings Volume 2875, Microelectronic Device and Multilevel Interconnection Technology II; (1996) https://doi.org/10.1117/12.250869
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

This paper discusses the gate oxide fields for MOS LSI design in the sub-10 nm gate oxide region for the nearest next few generations. Since practical determination of allowable gate oxide fields for scaled gate oxides strongly depends on oxide defect density levels, we measured defect densities for gate oxide thicknesses down to 3 nm. The defect-related breakdown failures affecting reliability were found to decrease with decreasing gate oxide thickness. The allowable gate oxide fields were calculated as a function of the gate oxide thickness and gate area to meet reliability criteria. The discussion also includes recent key issues such as the contribution of high-quality wafer substrates to allowable electric fields, and design guidelines for dual power supply voltages. Since the defect density levels depend on process, we generalized our discussion by showing the results for various gate areas.

Citation Download Citation

Katsuhiko Kubota, C. Suzuki, Kosuke Okuyama, and N. Suzuki "Gate oxide field design in the sub-10-nm region", Proc. SPIE 2875, Microelectronic Device and Multilevel Interconnection Technology II, (13 September 1996); https://doi.org/10.1117/12.250869

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available