Fabrication of micromechanical and optical components by ultraprecision cutting

Yutaka Yamagata; Toshiro Higuchi; Yuzuru Takashima; Katsunobu Ueda

doi:10.1117/12.251244

23 September 1996 Fabrication of micromechanical and optical components by ultraprecision cutting

Yutaka Yamagata, Toshiro Higuchi, Yuzuru Takashima, Katsunobu Ueda

Proceedings Volume 2881, Microelectronic Structures and MEMS for Optical Processing II; (1996) https://doi.org/10.1117/12.251244
Event: Micromachining and Microfabrication '96, 1996, Austin, TX, United States

Abstract

Micro mechanical parts and optical parts are fabricated through ultra precision cutting technique. The precision cutting technique has been considered to be inappropriate for micro parts fabrication of the micrometer order. Our ultra precision cutting technique with sub-micrometer cutting depth made it possible to fabricate 3D micro mechanical parts and micro optical parts. Following micro mechanical parts are fabricated: 10 micrometer shaft by lathe machining, 100 micrometer screw with 20 micrometer pitch thread, and 50 micrometer thickness lever made by stainless steel. Also it was able to fabricate micro optical parts such as holographic optical element with sawtooth cross section and pitch of 3 micrometer. The fabrication was carried out with newly developed ultra precision machine tool with X, Y, Z linear axis and one rotational axis using single crystalline diamond cutting tool. Those linear axis are controlled through hologram scale with 1 nm resolution. The fabrication process by precision cutting has proved to be faster and more precise compared to the lithography and etching method.

Citation Download Citation

Yutaka Yamagata, Toshiro Higuchi, Yuzuru Takashima, and Katsunobu Ueda "Fabrication of micromechanical and optical components by ultraprecision cutting", Proc. SPIE 2881, Microelectronic Structures and MEMS for Optical Processing II, (23 September 1996); https://doi.org/10.1117/12.251244

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available