Paper
3 October 1996 Dynamic error compensation of coordinate measuring machines for fast probing
Yuhai Mu, Chensong Dong, Jingbin Guo, Guoxiong Zhang
Author Affiliations +
Abstract
Due to the demand of shorter cycle times of measurement tasks, CMMs are expected to be used at high speeds. In such measuring process dynamic errors will have greater influence on the accuracy. The dynamic error properties should by analyzed in this case. Considering the analysis of a specific CMM, a dynamic error assessment model is established in this paper. The major deflections at the probe position due to accelerations are obtained by using the finite element calculations and the error data fitting polynomials of three coordinates are established. With a laser interferometer, the dynamic rotation errors of the CMM at the probe position are measured. By comparing the results of the measured dynamic errors using the laser interferometer and the ones obtained by the errors fitting polynomials, it is shown that dynamic error compensation for a specific CMM is possible in a certain degree.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuhai Mu, Chensong Dong, Jingbin Guo, and Guoxiong Zhang "Dynamic error compensation of coordinate measuring machines for fast probing", Proc. SPIE 2899, Automated Optical Inspection for Industry, (3 October 1996); https://doi.org/10.1117/12.253031
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Error analysis

Forward error correction

Bridges

Interferometers

Finite element methods

Analytical research

Data modeling

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