Microactuator fabricated by powder particle assemblage using microprobe technology

Takeshi Konno; Mitsuru Egashira; Norio Shinya

doi:10.1117/12.276629

19 June 1997 Microactuator fabricated by powder particle assemblage using microprobe technology

Takeshi Konno, Mitsuru Egashira, Norio Shinya

Proceedings Volume 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS; (1997) https://doi.org/10.1117/12.276629
Event: Smart Structures and Materials '97, 1997, San Diego, CA, United States

Abstract

In the previous paper, preliminary research results on powder particle assemblage technique using a microprobe was reported. It was shown that the technique makes it possible to manipulate powder particles one by one, etch microscopically and weld the powder particle into a substrate or other powder particles. In this work, the welding mechanism of this method and metallurgical properties of welded parts were investigated, and micro- actuators were fabricated by means of powder particle assemblage technique using the microprobe. The results indicated the potentiality of this technique for application to assemblage of micro-machine and micro-devices.

Citation Download Citation

Takeshi Konno, Mitsuru Egashira, and Norio Shinya "Microactuator fabricated by powder particle assemblage using microprobe technology", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276629

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available