Paper
19 June 1997 Wireless remotely readable microaccelerometer
Author Affiliations +
Abstract
The integration of MEMS, SAW devices and required microelectronics is presented in this paper. This unique combination of technologies results in a novel sensor that can be remotely sensed by a microwave system with the advantage of no power requirements or very low power requirements. Such a device is readily compatible with existing antenna technologies as the SAW device operates at 1 GHz. The microaccelerometer presented is simple in construction and easy to manufacture with existing silicon micromachining technology. Depending on the application certain design parameters can be modified to achieve the desired sensitivity. Similar modifications in the microelectronics can also be envisioned. A fabrication method to produce such a device is also presented. The relatively small size of the sensor makes it an ideal conformal sensor. The accelerometer finds application as air bag deployment sensors, vibration sensors for noise control, deflection and strain sensors, inertial and dimensional positioning systems, ABS/traction control, smart suspension, active roll stabilization and four wheel steering.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hareesh Subramanian, Vasundara V. Varadan, and Vijay K. Varadan "Wireless remotely readable microaccelerometer", Proc. SPIE 3046, Smart Structures and Materials 1997: Smart Electronics and MEMS, (19 June 1997); https://doi.org/10.1117/12.276611
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Sensors

Silicon

Acoustics

Lithium niobate

Phase shifts

Antennas

Control systems

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