Preparation of Ti:sapphire thin films on sapphire substrates by XeCl excimer laser ablation

Peter A. Atanasov; Rumen I. Tomov; Anna O. Dikovska; Zdravka I. Aneva; Vasilka Tsaneva; Zahari Y. Peshev

doi:10.1117/12.262953

27 December 1996 Preparation of Ti:sapphire thin films on sapphire substrates by XeCl excimer laser ablation

Peter A. Atanasov, Rumen I. Tomov, Anna O. Dikovska, Zdravka I. Aneva, Vasilka Tsaneva, Zahari Y. Peshev

Proceedings Volume 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications; (1996) https://doi.org/10.1117/12.262953
Event: Ninth International School on Quantum Electronics: Lasers: Physics and Applications, 1996, Varna, Bulgaria

Abstract

This work summarized the results of XeCl excimer laser ablation deposition procedure of Ti-doped sapphire thin films. Three types of targets are utilized-monocrystalline and two different ceramics synthesized in vacuum and H₂ ambient. The influence of the target's type in the film quality is studied. The films are investigated by XRD and SEM, as well as by optical methods. Optical emission measurements of laser ablated plumes are performed.

Citation Download Citation

Peter A. Atanasov, Rumen I. Tomov, Anna O. Dikovska, Zdravka I. Aneva, Vasilka Tsaneva, and Zahari Y. Peshev "Preparation of Ti:sapphire thin films on sapphire substrates by XeCl excimer laser ablation", Proc. SPIE 3052, Ninth International School on Quantum Electronics: Lasers--Physics and Applications, (27 December 1996); https://doi.org/10.1117/12.262953

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