Paper
22 September 1997 S-matrix propagation algorithm for full-vectorial electromagnetic simulation and design of gratings
Author Affiliations +
Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281352
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel
Abstract
S-matrix propagation algorithm for electromagnetic analysis of multilayer gratings with Rayleigh-Fourier implementation and TM-polarization issue renewal is overviewed. Examples of polarized-antireflection grating design are considered.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark Auslender, David Levy, and Shlomo Hava "S-matrix propagation algorithm for full-vectorial electromagnetic simulation and design of gratings", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281352
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KEYWORDS
Antireflective coatings

Optical design

Radio propagation

Wave propagation

Dielectrics

Etching

Silicon

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