Ion-beam polishing of electroless nickel masters for x-ray replication optics

Mauro Ghigo; P. Cerutti; Oberto Citterio; Paolo Conconi; Francesco Mazzoleni

doi:10.1117/12.278863

11 July 1997 Ion-beam polishing of electroless nickel masters for x-ray replication optics

Mauro Ghigo, P. Cerutti, Oberto Citterio, Paolo Conconi, Francesco Mazzoleni

Author Affiliations +

Proceedings Volume 3113, Grazing Incidence and Multilayer X-Ray Optical Systems; (1997) https://doi.org/10.1117/12.278863
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

The production of future high throughput x-ray telescopes optics using a replication method foresees the use of a high number of mandrels and a tight control of their shape. The proposed ion beam polishing of the mandrels is a technique that is either cost effective and offers accurate shape control. The aluminum-kanigen coated mandrels are initially diamond turned, superpolished to the required microroughness and then figured with ion beam polishing. An ion beam facility has been built to test the concept. After the characterization of the source, samples of superpolished electroless nickel have been ion polished. The behavior of the material and the degradation of its microroughness after the etching have been investigated and the results are here reported.

Citation Download Citation

Mauro Ghigo, P. Cerutti, Oberto Citterio, Paolo Conconi, and Francesco Mazzoleni "Ion-beam polishing of electroless nickel masters for x-ray replication optics", Proc. SPIE 3113, Grazing Incidence and Multilayer X-Ray Optical Systems, (11 July 1997); https://doi.org/10.1117/12.278863

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