Multipoint displacement probe combining a microlens array with an acousto-optic deflector scanner

LiJiang Zeng; Hirokazu Matsumoto; Keiji Kawachi

doi:10.1117/12.277747

7 July 1997 Multipoint displacement probe combining a microlens array with an acousto-optic deflector scanner

LiJiang Zeng, Hirokazu Matsumoto, Keiji Kawachi

Proceedings Volume 3131, Optical Scanning Systems: Design and Applications; (1997) https://doi.org/10.1117/12.277747
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A multi-point dynamic displacement probe was developed for measuring dynamic displacement and deformation. This method uses an acousto-optic deflector (AOD) as a diffractive scanner to allow the laser beam to scan a self-focusing microlens array (SMLA), and then uses the resulting focused spot to scan the diffuse surface. The focus information contained in the laser beam reflected from the diffuse surface is then transformed into the variations in shape of spot for detection. Due to the very high scanning speed of the AOD, the relative position of many points, and thus the dynamic deformation, can be measured in near real-time. This paper describes the method's principles, accuracy, and error sources.

Citation Download Citation

LiJiang Zeng, Hirokazu Matsumoto, and Keiji Kawachi "Multipoint displacement probe combining a microlens array with an acousto-optic deflector scanner", Proc. SPIE 3131, Optical Scanning Systems: Design and Applications, (7 July 1997); https://doi.org/10.1117/12.277747

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