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We report the achievement of a superpolished surface, suitable for x-ray reflection, on bare stainless steel. The rms roughness obtained on various samples varied from 2.2 to 4.2 angstroms, as measured by an optical profiler with a bandwidth 0.29 - 100 mm-1. The type 17-4 PH precipitation-hardening stainless steel used to make the mirrors is also capable of ultrastability and has good manufacturability. This combination of properties makes it an excellent candidate material for mirror substrates. We describe the successful utilization of this type of steel in making elliptical-cylinder mirrors for a soft-x-ray microprobe system at the Advanced Light Source, and discuss possible reasons for its unusual stability and polishability.
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Malcolm R. Howells, John M. Casstevens, "Achievement of a superpolish on bare stainless steel," Proc. SPIE 3152, Materials, Manufacturing, and Measurement for Synchrotron Radiation Mirrors, (1 November 1997); https://doi.org/10.1117/12.295567