Crystalline and electrical properties of SrBi2Ta2O9 thin films prepared by laser ablation

Yoshihiro Oishi; Yoshinori Matsumuro; Masanori Okuyama

doi:10.1117/12.300688

20 February 1998 Crystalline and electrical properties of SrBi2Ta2O9 thin films prepared by laser ablation

Yoshihiro Oishi, Yoshinori Matsumuro, Masanori Okuyama

Proceedings Volume 3175, Third International Conference on Thin Film Physics and Applications; (1998) https://doi.org/10.1117/12.300688
Event: Third International Conference on Thin Film Physics and Applications, 1997, Shanghai, China

Abstract

SrBi₂Ta₂O₉ thin films are prepared on Pt sheets by the laser ablation method using an ArF excimer laser below 560 degrees Celsius. Crystallographic properties of the film are characterized as parameters of substrate temperature, O₂ or N₂O gas pressure and laser repetition frequency. SrBi₂Ta₂O₉ thin films are oriented preferentially to (105) on Pt sheets. The depth profile of x-ray photoelectron spectra (XPS) reveals a homogeneous composition and XPS signals of Bi suggest oxygen deficiency of the film on Pt sheet. The films deposited on Pt sheet consist of spherical grains of about 100 nm diameter. D-E hysteresis loops is observed at SrBi₂Ta₂O₉ thin film deposited on Pt sheet. The remanent polarization was 2.5 (mu) C/cm² and coercive force was 34 kV/cm.

Citation Download Citation

Yoshihiro Oishi, Yoshinori Matsumuro, and Masanori Okuyama "Crystalline and electrical properties of SrBi2Ta2O9 thin films prepared by laser ablation", Proc. SPIE 3175, Third International Conference on Thin Film Physics and Applications, (20 February 1998); https://doi.org/10.1117/12.300688

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available